JPH01128829U - - Google Patents
Info
- Publication number
- JPH01128829U JPH01128829U JP2443888U JP2443888U JPH01128829U JP H01128829 U JPH01128829 U JP H01128829U JP 2443888 U JP2443888 U JP 2443888U JP 2443888 U JP2443888 U JP 2443888U JP H01128829 U JPH01128829 U JP H01128829U
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- tanks
- pipes
- tank
- discharge port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 14
- 238000012994 industrial processing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2443888U JPH01128829U (en]) | 1988-02-25 | 1988-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2443888U JPH01128829U (en]) | 1988-02-25 | 1988-02-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01128829U true JPH01128829U (en]) | 1989-09-01 |
Family
ID=31244286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2443888U Pending JPH01128829U (en]) | 1988-02-25 | 1988-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01128829U (en]) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000015082A (ja) * | 1998-07-03 | 2000-01-18 | Kanto Chem Co Inc | 安全検出型薬液供給装置 |
| JP2008031115A (ja) * | 2006-07-31 | 2008-02-14 | Sunstar Inc | 液体組成物の製造方法及び装置 |
| JP2016157834A (ja) * | 2015-02-25 | 2016-09-01 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理液供給方法および装置 |
-
1988
- 1988-02-25 JP JP2443888U patent/JPH01128829U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000015082A (ja) * | 1998-07-03 | 2000-01-18 | Kanto Chem Co Inc | 安全検出型薬液供給装置 |
| JP2008031115A (ja) * | 2006-07-31 | 2008-02-14 | Sunstar Inc | 液体組成物の製造方法及び装置 |
| JP2016157834A (ja) * | 2015-02-25 | 2016-09-01 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理液供給方法および装置 |